A novel MEMS pressure sensor fabricated on an optical fiber

IEEE Photonics Technology Letters

Volumn 13, Issue 9, 2001, Pages 993-995

  Abeysinghe, Don C ^a   Dasgupta, Samhita ^b   Boyd, Joseph T ^c   Jackson, Howard E ^a  

^a UNIVERSITY OF CINCINNATI   (United States)

^b GE GLOBAL RESEARCH   (United States)

^c University of Cincinnati   (United States)

Author keywords

Fabry P rot interferometer; Fiber sensor; MEMS; Pressure sensor

Indexed keywords

BANDWIDTH; CHEMICAL BONDS; ETCHING; FABRY-PEROT INTERFEROMETERS; FIBER OPTIC SENSORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTOLITHOGRAPHY;

PRESSURE SENSORS;

MULTIMODE FIBERS;

EID: 0035440918     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.942671     Document Type: Article

References (8)

1. Optically interrogated MEMS pressure sensors for propulsion applications
2. Micromachined Fabry-Pérot cavity pressure transducer
3. Optical pressure and temperature sensors for aerospace applications
4. Optical micromachined pressure sensor for aerospace applications
5. Optical pressure sensor head fabrication using ultra-thin silicon wafer anodic bonding
6. Micromachined Fabry-Pérot interferometer with corrugated silicon diaphragm for fiberoptic sensing applications
7. The mechanism of field assisted silicon-glass bonding