Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications

Sensors and Actuators, A: Physical

Volumn 70, Issue 1-2, 1998, Pages 42-47

  Dellmann, Laurent ^a   Roth, Sylvian ^a   Beuret, Cynthia ^a   Racine, Georges André ^a   Lorenz, Hubert ^b   Despont, Michel ^c   Renaud, Philippe ^b   Vettiger, Peter ^c   De Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b EPFL   (Switzerland)

^c IBM RESEARCH ZURICH   (Switzerland)

Author keywords

Aspect ratio; Photoresist; Piezoelectric motor; SU 8

Indexed keywords

EID: 0001817862     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00110-1     Document Type: Article

References (9)

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9. L. Dellmann, S. Roth, C. Beuret, G.-A. Racine, H. Lorenz, M. Despont, P. Renaud, P. Vettiger, N.F. de Rooij, Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications, Transducers 97, Chicago, USA, 16-19 June 1997, pp. 641-644.