Ultra-miniature fiber-optic pressure sensor using white light interferometry

Journal of Micromechanics and Microengineering

Volumn 15, Issue 1, 2005, Pages 71-75

  Totsu, Kentaro ^a   Haga, Yoichi ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC NOISE; DIAGNOSIS; FABRY-PEROT INTERFEROMETERS; INTERFEROMETRY; LIGHT REFLECTION; MEDICAL APPLICATIONS; OPTICAL FIBERS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REACTIVE ION ETCHING; SEMICONDUCTOR LASERS;

BLOOD PRESSURE MONITORING; DIAPHRAGM; SENSOR CAVITY; ULTRA-MINIATURE FIBER-OPTIC PRESSURE SENSORS;

FIBER OPTIC SENSORS;

EID: 12344307210     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/1/011     Document Type: Article

References (15)

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