Intermediate-layer lithography method for producing metal micropatterns

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 677-685

  Liu, Xinchuan ^a   Luo, Cheng ^a  

^a Bogard Hall M116A   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

LITHOGRAPHY; MICROFABRICATION; POLYMETHYL METHACRYLATES; THIN FILMS;

INTERMEDIATE-LAYER LITHOGRAPHY (ILL); MACROCUTTING PROCESS; METAL MICROPATTERNS; SQUARE DOTS; SQUARE HOLES;

SHEET METAL;

EID: 34249905853     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2718961     Document Type: Article

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