Embedded vertically grown carbon nanotubes for field emission applications

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 3, 2007, Pages 822-828

  Abdi, Yaser ^a   Koohshorkhi, Javad ^b   Mohajerzadeh, Shams ^b   Darbari, Sara ^b   Sanaee, Zeinab ^b  

^a UNIVERSITY OF TEHRAN   (Iran)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACETYLENE; CATALYSTS; CHARACTERIZATION; CHEMICAL VAPOR DEPOSITION; ENCAPSULATION; FIELD EMISSION; FILM GROWTH; POLISHING; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; TITANIUM OXIDES;

DC PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; ENCAPSULATED STRUCTURES; ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA ASHING; SEQUENTIAL POLISHING;

CARBON NANOTUBES;

EID: 34249899913     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2731324     Document Type: Article

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