Fabrication of free standing resolution standards using proton beam writing

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 260, Issue 1, 2007, Pages 474-478

  Zhang, F ^a   van Kan, J A ^a   Chiam, S Y ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

DUV; Ni grid; Proton beam writing; Resolution standards

Indexed keywords

ELECTROPLATING; ION BEAMS; MICROMACHINING; NANOSTRUCTURES; PROTON BEAMS; STANDARDS;

DUV; NI GRID; PROTON BEAM WRITING; RESOLUTION STANDARDS;

OPTICAL RESOLVING POWER;

EID: 34249898606     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2007.02.065     Document Type: Article

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