An automatic beam focusing system for MeV protons

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 389-393

  Udalagama, C N B ^a   Bettiol, A A ^a   Van Kan, J A ^a   Teo, E J ^a   Breese, M B H ^a   Osipowicz, T ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Automatic MeV proton beam focusing; Proton beam writing; Secondary electron imaging

Indexed keywords

ELECTRON BEAMS; IMAGING TECHNIQUES; MAGNETIC LENSES;

AUTOMATIC MEV PROTON BEAM FOCUSING; PROTON BEAM WRITING; SECONDARY ELECTRON IMAGING;

PROTON BEAMS;

EID: 33644501149     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.088     Document Type: Conference Paper

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