Proton beam micromachined resolution standards for nuclear microprobes

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 306-311

  Watt, F ^a   Rajta, I ^a   Van Kan, J A ^a   Bettiol, A A ^a   Osipowicz, T ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Proton beam; Proton beam micromachining; Resolution standards; State of the art resolutions

Indexed keywords

MICROMACHINING; MICROSTRUCTURE; PROTON BEAMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STANDARDS; X RAY ANALYSIS;

NUCLEAR MICROPROBES; PROTON BEAM MICROMACHINING (PBM);

NUCLEAR INSTRUMENTATION;

EID: 0036569418     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01288-5     Document Type: Conference Paper

References (11)

1. The high energy ion microprobe