Suitable test structures for submicron ion beam analysis

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 190, Issue 1-4, 2002, Pages 312-317

  Spemann, D ^a   Reinert, T ^a   Vogt, J ^a   Dobrev, D ^b   Butz, T ^a  

^a UNIVERSITY OF LEIPZIG   (Germany)

^b GSI HELMHOLTZZENTRUM FÜR SCHWERIONENFORSCHUNG GMBH   (Germany)

Author keywords

Nanowhisker; Semiconductor heterostructure; Submicron beam spot shape; Submicron beam spot sizes; Test sample

Indexed keywords

CRYSTAL ORIENTATION; CRYSTAL WHISKERS; HETEROJUNCTIONS; NANOTECHNOLOGY; PROTONS; SEMICONDUCTING GALLIUM ARSENIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS;

ION BEAM ANALYSIS;

ION BEAMS;

EID: 0036569682     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)01253-8     Document Type: Conference Paper

References (6)