On integrated CMOS-MEMS system-on-chip

3rd International IEEE Northeast Workshop on Circuits and Systems Conference, NEWCAS 2005

Volumn 2005, Issue , 2005, Pages 31-34

  Ghosh, Soumik ^a   Bayoumi, Magdy ^a  

^a University of Louisiana at Lafayette   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS FABRICATION; MICROELECTROMECHANICAL SYSTEMS (MEMS); SYSTEM-ON-CHIP;

COMPUTER SIMULATION; FABRICATION; MICROELECTROMECHANICAL DEVICES;

CMOS INTEGRATED CIRCUITS;

EID: 33745793430     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEWCAS.2005.1496726     Document Type: Conference Paper

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