MEMS switches

IEEE Instrumentation and Measurement Magazine

Volumn 6, Issue 1, 2003, Pages 12-15

  Majumder, S ^a   Lampen, J ^a   Morrison, R ^a   Maciel, J ^a  

^a Radant MEMS Incorporated   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN OF SOLIDS; ELECTROSTATICS; ENERGY GAP; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SCANNING ELECTRON MICROSCOPY; STICTION; SURFACE TREATMENT;

METAL-TO-METAL MICROSWITCH; SURFACE MICROMACHINING;

SEMICONDUCTOR SWITCHES;

EID: 0037353832     PISSN: 10946969     EISSN: None     Source Type: Journal    
DOI: 10.1109/MIM.2003.1184267     Document Type: Article

References (5)

1. E.R. Brown, "RF-MEMS switches for reconfigurable integrated circuits," IEEE Trans. Microwave Theory Tech., vol. 46, Nov. 1998.
2. G.M. Rebeiz and J.B. Muldavin, "RF MEMS switches and switch circuits," IEEE Microwave, vol. 2, pp. 59-71, Dec. 2001.
3. P.M. Zavracky, S. Majumder, and N.E. McGruer, "Micromechanical switches fabricated using nickel surface micromachining," J. Micromech. Syst., vol. 6, pp. 3-9, 1997.
4. S. Majumder, N.E. McGruer, P.M. Zavracky, G.G. Adams, R.H. Morrison, and J. Krim, "Measurement and modeling of surface micromachined, electrostatically actuated microswitches" in Proc. Transducers '97, Chicago, IL, Jun. 16-19, 1997.
5. M.L. Schirmer, P.M. Zavracky, N.E. McGruer, S. Majumder, R.H. Morrison, D. Potter, G.G. Adams, and J. Krim. "Design, characterization, and application of surface micromachined, electrostatically actuated microswitches," presented at the National Association of Relay Manufacturers (NARM) Conf., Chicago, IL, 20-22 Apr. 1998.