Nano-tribological characteristics of PZT thin film investigated by atomic force microscopy

Surface and Coatings Technology

Volumn 201, Issue 18, 2007, Pages 7983-7991

  Chung, Koo Hyun ^a   Lee, Yong Ha ^a   Kim, Young Tae ^a   Kim, Dae Eun ^a   Yoo, Jingyoo ^b   Hong, Seungbum ^c  

^a Yonsei University   (South Korea)

^b SAMSUNG Electronics   (South Korea)

^c Samsung Advanced Institute of Technology (SAIT)   (South Korea)

Author keywords

Atomic Force Microscope (AFM); Friction; PZT film; Wear

Indexed keywords

CRYSTAL MICROSTRUCTURE; FRICTION; SOL-GEL PROCESS; THIN FILMS; TRIBOLOGY; WEAR OF MATERIALS;

FRICTION COEFFICIENT; NANO-TRIBOLOGY;

LEAD ALLOYS;

CRYSTAL MICROSTRUCTURE; FRICTION; LEAD ALLOYS; SOL-GEL PROCESS; THIN FILMS; TRIBOLOGY; WEAR OF MATERIALS;

EID: 34249043693     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.03.044     Document Type: Article

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