Spectrophotometric and Raman spectroscopic characterization of ALD grown TiO2 thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6596, Issue , 2007, Pages

  Aarik, Jaan ^a   Kasikov, Aarne ^a   Niilisk, Ahti ^a  

^a UNIVERSITY OF TARTU   (Estonia)

Author keywords

Atomic layer deposition; Inhomogeneity; Raman spectroscopy; Refractive index; Thin films; Titanium dioxide

Indexed keywords

ATOMIC LAYER DEPOSITION; FILM GROWTH; RAMAN SCATTERING; REFRACTIVE INDEX; SPECTROPHOTOMETRY; TITANIUM DIOXIDE;

EXTINCTION INDEX; FILM STRUCTURE; TRANSMISSION CURVES;

THIN FILMS;

EID: 34249042870     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.726492     Document Type: Conference Paper

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