A method to extract the lateral and normal components of motion from the capacitance change of a moving MEMS comb drive

Journal of Micromechanics and Microengineering

Volumn 17, Issue 3, 2007, Pages 447-451

  Van Spengen, W Merlijn ^a,b   Heeres, Erwin C ^a  

^a LEIDEN UNIVERSITY   (Netherlands)

^b Falco Systems   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL NONLINEARITIES; MECHANICAL DRIVES; MICROMACHINING; MOTION CONTROL; POSITION CONTROL; SURFACE TREATMENT;

ACTUATED COMB DRIVES; ACTUATION VOLTAGE; PARASITIC OUT-OF-PLANE MOTION;

MEMS;

EID: 34249099985     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/3/005     Document Type: Article

References (10)

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