Vertically supported two-directional comb drive

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1439-1445

  Lee, Ki Bang ^a   Lin, Liwei ^b  

^a INSTITUTE OF BIOENGINEERING AND NANOTECHNOLOGY   (Singapore)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMB-SHAPED ELECTRODES; MEMS; OPTICAL COMPONENTS; TWO-DIRECTIONAL COMB DRIVE;

ELECTRIC POTENTIAL; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; MICROSTRUCTURE; OPTICAL SYSTEMS; RESONATORS; SURFACE PROPERTIES; VIBRATION CONTROL;

ELECTRODES;

EID: 22544435850     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/009     Document Type: Article

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