A micromachined capacitive incremental position sensor: Part 1. Analysis and simulations

Journal of Micromechanics and Microengineering

Volumn 16, Issue 6, 2006, Pages

  Kuijpers, A A ^a   Krijnen, G J M ^a   Wiegerink, R J ^a   Lammerink, T S J ^a   Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; COMPUTER SIMULATION; CONTROL NONLINEARITIES; FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SIGNAL TO NOISE RATIO;

FINITE ELEMENT (FE) SIMULATIONS; INCREMENTAL CAPACITANCE MEASUREMENT MODE (ICMM); PERIODIC GEOMETRIES;

SENSORS;

EID: 33646747222     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/6/S18     Document Type: Article

References (27)

1. Vettiger P, Desmont M, Drechsler U D, rig U H, berle W, Luwyche M I, Rothuizen H E, Stutz R, Widmer R and Binnig G K 2000 The 'Millipede'-more than one thousand tips for future AFM data storage IBM J. Res. Dev. 44 323-40
2. Abelmann L, Bolhuis T, Hoexum A M, Krijnen G J M and Lodder J C 2003 Large capacity probe recording using storage robots IEE Proc. A 150 218-21
3. Binnig G, Quate C F and Gerber C 1986 Atomic force microscope Phys. Rev. Lett. 56 930
4. Deladi S, Berenschot J W, de Boer M J, Krijnen G J M and Elwenspoek M C 2004 An AFM-based device for in-situ characterization of nano-wear Proc. MEMS 2004 (Maastricht, The Netherlands) p 181
5. Toshiyoshi H et al 1999 Fabrication of micromechanical tunneling probes and actuators on a silicon chip Japan J. Appl. Phys. 38 7185-9
6. Lim G, Minami K, Sugihara M, Uchiyama M and Esashi M 1995 Active catheter with multi-link structure based on silicon micromachining, Proc. 8th IEEE Workshop Micro Electra Mechanica Systems (Amsterdam, The Netherlands) p 116
7. Mastrangelo C H, Burns M A and Burke D T 1998 Microfabricated devices for genetic diagnostics Proc. IEEE 86 1769-87
8. Muthuswamy J, Salas D and Okandan M 2002 A chronic micropositioning system for neurophysiology Proc. 2nd Joint EMBS/BMES Conf. (Houston, TX, USA, 23-26 Oct)
9. Bergander A 2003 Micropositioners for microscopy applications and microbiology based on piezoelectric actuators J. Micromechatronics 2 65-76
10. Grade J D 2004 Advanced, vibration resistant, comb-drive actuators for use in a tunable laser source, Sensors Actuators A 114 413-22
11. Ferreira A, Agnus J, Chaillet N and Breguet J M 2004 A smart microrobot on chip: design, fabrication and control IEEE/ASME Trans. Mechatronics 9 508-19
12. Elwenspoek M and Wiegerink R J 2000 Mechanical Microsensors (Berlin: Springer) pp 13-21
13. Pantazi A, Lantz M A, Cherubini G, Pozidis H and Eleftheriou E 2004 A servomechanism for a micro-electromechanical-system-based scanning-probe data storage device Nanotechnology 15 S612-21
14. Eleftheriou E et al 2003 Millipede-a MEMS-based scanning-probe data-storage system IEEE Trans. Magn. 39 2
15. Chu L L and Gianchandani Y B 2003 A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing J. Micromech. Microeng. 13 279-85
16. Baxter L K et al 1997 Capacitive Sensors: Design and Applications (New York: IEEE)
17. Kosel P B, Munro G S and Vaughan R 1981 Capacitive transducer for accurate displacement control IEEE Trans. Instrum. Meas. 2 114
18. Klaassen K B and van Peppen J C L 1982 Linear capacitive microdisplacement transduction using phase read-out Sensors Actuators 3 209-20
19. www.opticalencoder.com
20. www.GlobalSpec.com
21. Fraden J 1996 Handbook of Modern Sensors, Physics, Designs and Applications (New York: Spinger)
22. Kuijpers A A, Krijnen G J M, Wiegerink R J, Lammerink T S J and Elwenspoek M 2004 Capacitive long-range position sensor for microactuators, Proc. MEMS (Maastricht, The Netherlands) p 544
23. Kuijpers A A, Krijnen G J M, Wiegerink R J, Lammerink T S J and Elwenspoek M 2003 Micromachined capacitive long-range displacement sensor Proc. Eurosensors XVII (Guimares, Portugal, 21-24 September) pp 560-3
24. Kuijpers A A, Krijnen G J M, Wiegerink R J, Lammerink T S J and Elwenspoek M 2003 2D-finite-element simulations for long-range capacitive position sensor J. Micromech. Microeng. 13 S183-9
25. Kuijpers A A 2004 Micromachined capacitive long-range displacement sensor for nano-positioning of microactuator systems PhD Thesis University of Twente, Enschede, The Netherlands
26. www.femlab.com, comsol, Sweden
27. Cheng D K 1989 Field and Wave Electromagnetics (Reading, MA: Addison-Wesley)