Characterization and failure analysis of MEMS: High resolution optical investigation of small out-of-plane movements and fast vibrations

Microsystem Technologies

Volumn 10, Issue 2, 2004, Pages 89-96

  Merlijn van Spengen, W ^a,b   Puers, R ^b   Mertens, R ^a,b   De Wolf, Ingrid ^a  

^a IMEC   (Belgium)

^b UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

3D imaging; Characterization; Deflection; Deformation; Failure analysis; High speed imaging; Interferometer; MEMS; Microsystems; Reliability; Resonance

Indexed keywords

FAILURE ANALYSIS; HOLOGRAPHY; IMAGING SYSTEMS; INTERFEROMETERS; LASER APPLICATIONS; RESONANCE; VIBRATION MEASUREMENT; VIBRATIONS (MECHANICAL);

DEFLECTION; HIGH SPEED IMAGING; LASER TV HOLOGRAPHY; MICROSYSTEMS; THREE DIMENSIONAL IMAGING;

MICROELECTROMECHANICAL DEVICES;

EID: 1142288266     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-003-0326-7     Document Type: Article

References (11)

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11. van Spengen WM; Puers R; Mertens R; De Wolf I (2002) Experimental characterization of stiction due to charging in RF MEMS. Proc IEEE International Electron Devices Meeting (IEDM) (accepted for publication)