Temperature dependence of the formation of highly tetrahedral a-C:H

Diamond and Related Materials

Volumn 5, Issue 3-5, 1996, Pages 425-428

  Sattel, S ^a   Giessen T ^a   Roth, H ^a   Scheib, M ^a   Samlenski, R ^b   Brenn, R ^b   Ehrhardt, H ^a   Robertson, J ^c  

^a Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

^b UNIVERSITY OF FREIBURG   (Germany)

^c UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Highly tetrahedral a C:H; Ion beam deposition; Low pressure plasma beam; Substrate temperature

Indexed keywords

EID: 0041374767     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00461-0     Document Type: Article

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