A general framework for state estimation in high-mix semiconductor manufacturing

Proceedings of the American Control Conference

Volumn , Issue , 2007, Pages 3636-3641

  Wang, Jin ^a   He, Q Peter ^b   Edgar, Thomas F ^c  

^a AUBURN UNIVERSITY   (United States)

^b TUSKEGEE UNIVERSITY   (United States)

^c The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL THEORY; CURVE FITTING; ELECTRIC CONDUCTIVITY; ESTIMATION; GEODESY; INDUSTRIAL ENGINEERING; KALMAN FILTERS; LEAST SQUARES APPROXIMATIONS; MARKOV PROCESSES; MILITARY DATA PROCESSING; MODAL ANALYSIS; SEMICONDUCTING INDIUM; SEMICONDUCTOR MATERIALS; WAVE FILTERS;

(MAPPED) LEAST SQUARES; ADAPTIVE METHODS; ADAPTIVE VERSIONS; BAYESIAN; BEST LINEAR UNBIASED ESTIMATE; ESTIMATION PROBLEMS; FILTER-BASED; GAUSS-MARKOV (GM) MODEL; GENERAL FRAMEWORK; PROCESS DATA; RECURSIVE LEAST SQUARES (RLS); SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR MANUFACTURING PROCESSES; SIMULATION EXAMPLE; STATE ESTIMATION (SE) METHODS;

STATE ESTIMATION;

EID: 34248161716     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2007.4282987     Document Type: Conference Paper

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