Automated process control optimization to control low volume products based on high volume products data

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5755, Issue , 2005, Pages 145-156

  Levin, Tatiana ^a   Geier, Issi ^a   Zhivotovsky, Alex ^a   Aframiam, Nilufar ^a   Friedlander Klar, Hamutal ^a  

^a INTEL CORPORATION   (United States)

Author keywords

Advanced Process control; APC; EWMA; Low volume product runners; Product to product bias; Q chart; Sequential test

Indexed keywords

ALGORITHMS; AUTOMATION; COMPUTER SIMULATION; DATA ACQUISITION; MEASUREMENT THEORY;

ADVANCED PROCESS CONTROL; APC; EWMA; LOW VOLUME PRODUCT RUNNERS; PRODUCT TO PRODUCT BIAS; Q-CHART; SEQUENTIAL TEST;

PROCESS CONTROL;

EID: 25144476175     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.598409     Document Type: Conference Paper

References (7)

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5. Statistical Research Group, Columbia University (1945). "Sequential Analysis of Statistical Data: Applications", Columbia University Press, New York, NY.
6. Wald, A, "Sequential Analysis", John Wiley & Sons, New York, NY.
7. Ziqiang John Mao, Issi Geier. "Model-Based Fault Detection and Metrology Error Rejection in Registration APC System", SPIE Vol. 5378 pp.48-57 (2004)