Observability and state estimation for multiple product control in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 4, 2005, Pages 592-604

  Pasadyn, Alexander J ^a   Edgar, Thomas F ^b  

^a University of Texas ^*

^b The University of Texas at Austin   (United States)

Author keywords

Kalman filtering; Observability; Process control; Semiconductor process modeling; State estimation

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; KALMAN FILTERING; OBSERVABILITY; PROCESS CONTROL; STATE ESTIMATION;

SEMICONDUCTOR MANUFACTURING; SEMICONDUCTOR PROCESS MODELING;

SEMICONDUCTOR MATERIALS;

EID: 28644443695     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2005.858505     Document Type: Conference Paper

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