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Volumn 84, Issue 5-8, 2007, Pages 829-832

Focused-ion-beam direct structuring of fused silica for fabrication of nano-imprinting templates

Author keywords

Focused ion beam; Fused silica; Nano imprinting templates; Surface roughness

Indexed keywords

ATOMIC FORCE MICROSCOPY; FOCUSED ION BEAMS; NANOIMPRINT LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS;

FOCUSED ION BEAM SYSTEMS; ROOT MEAN SQUARE (RMS); TOPOGRAPHY MEASUREMENT;

FUSED SILICA;

LITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SILICA;

EID: 34247887528 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2007.01.013 Document Type: Article

Times cited : (13)

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