Nickel and platinum ohmic contacts to polycrystalline 3C-silicon carbide

Materials Science and Engineering: B

Volumn 139, Issue 2-3, 2007, Pages 235-239

  Zhang, Jingchun ^a   Howe, Roger T ^b   Maboudian, Roya ^a  

^a University of California   (United States)

^b Stanford University   (United States)

Author keywords

Nickel; Ohmic metal contacts; Platinum; Silicon carbide

Indexed keywords

DOPING (ADDITIVES); PLATINUM; POLYCRYSTALLINE MATERIALS; SILICON CARBIDE; THIN FILMS;

CONTACT RESISTIVITY; LOW-PRESSURE CHEMICAL VAPOR DEPOSITION (LPCVD); NICKEL CONTACTS; ROOM TEMPERATURE;

OHMIC CONTACTS;

EID: 34247646056     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2007.03.006     Document Type: Article

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