Formation of low resistivity ohmic contacts to n-type 3C-SiC

Solid-State Electronics

Volumn 46, Issue 8, 2002, Pages 1227-1230

  Wan, Jianwei ^a   Capano, Michael A ^a   Melloch, Michael R ^a  

^a Purdue University   (United States)

Author keywords

3C SiC; Ohmic contact; Sheet resistance; Specific contact resistivity

Indexed keywords

ANNEALING; ELECTRIC CONDUCTIVITY; ELECTRIC CONTACTS; NICKEL; OHMIC CONTACTS; PHOSPHORUS;

SPECIFIC CONTACT RESISTIVITY;

SILICON CARBIDE;

EID: 0036680669     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(02)00013-8     Document Type: Article

References (12)