Characterization of ferroelectric and piezoelectric properties of lead titanate thin films deposited on Si by sputtering

Sensors and Actuators, A: Physical

Volumn 63, Issue 2, 1997, Pages 91-96

  Jaber, Boujemaâ ^a   Remiens, Denis ^a   Cattan, Eric ^a   Tronc, Pierre ^a   Thierry, Bernard ^a  

^a UNIVERSITÉ DE VALENCIENNES   (France)

Author keywords

Ceramics; Ferroelectric properties; Lead titanate; Piezoelectric properties; Silicon

Indexed keywords

ANNEALING; CERAMIC MATERIALS; DIELECTRIC FILMS; DIELECTRIC PROPERTIES OF SOLIDS; FERROMAGNETIC MATERIALS; LEAD COMPOUNDS; PEROVSKITE; PIEZOELECTRIC MATERIALS; SILICA; SILICON; THIN FILMS;

LEAD TITANATE; PEROVSKITE CERAMICS;

PIEZOELECTRIC TRANSDUCERS;

EID: 0031258032     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01530-6     Document Type: Article

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