Micromachined bistable 1 × 2 switch for optical fibers

Microelectronic Engineering

Volumn 53, Issue 1, 2000, Pages 561-564

  Pieri, F ^a   Piotto, M ^a  

^a UNIVERSITY OF PISA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; HOOKS; MICROMACHINING; OPTICAL BISTABILITY; OPTICAL FIBERS; OPTICAL SWITCHES; RESISTORS; SILICON; THIN FILMS;

LOCK RELEASE MECHANISMS; THERMOMECHANICALLY ACTUATED DEVICES;

MICROELECTRONIC PROCESSING;

EID: 0034206302     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00378-6     Document Type: Article

References (5)

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