An electrostatically actuated 1 × 2 moving-fiber switch

IEEE Photonics Technology Letters

Volumn 15, Issue 1, 2003, Pages 39-41

  Hoffmann, Martin ^a   Nüsse, Dirk ^a   Voges, Edgar ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

Microelectromechanical devices; Optical fiber devices; Optical fiber switches; Optical device fabrication

Indexed keywords

ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; OPTICAL VARIABLES MEASUREMENT; SINGLE MODE FIBERS; VOLTAGE MEASUREMENT;

ACTUATION VOLTAGE; OPTICAL DEVICE FABRICATION; OPTICAL FIBER SWITCHES; OPTICAL PROTECTION SWITCHING;

OPTICAL SWITCHES;

EID: 0037248959     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2002.805806     Document Type: Article

References (7)

1. S. Nagaoka, "Compact latching type single-mode fiber switches and their applications in subscriber loop networks," IEICE Trans. Electron., vol. E80-C, pp. 149-153, 1997.
2. P. Kopka, M. Hoffmann, and E. Voges, "Coupled U-shaped cantilever actuators for 1 × 4 and 2 × 2 optical fiber switches," J. Micromech. Microeng., vol. 10, pp. 260-264, 2000.
3. C. Marxer and N. F. de Rooij, "Micro-opto-mechanical 2 × 2 Switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation," J. Lightwave Technol., vol. 17, pp. 2-6, Jan. 1999.
4. E. Ollier, P. Labeye, and F. Revol, "Micro-opto mechanical switch integrated on silicon," Electron. Lett., vol. 31, no. 23, pp. 2003-2005, 1995.
5. M. Hoffmann, D. Nüsse, and E. Voges, "Bulk silicon micromachined electrostatic microactuators for use in optical MEMS," Conf. Proc. Actuator 2002, Bremen, pp. 304-307, 2002.
6. R. Lagtenberg, J. Gilbert, S. Senturia, and M. Elwenspoek, "Electrostatic curved electrode actuators," J. Microelectromech. Syst., vol. 6, pp. 257-265, Sept. 1997.
7. M. Hoffmann, D. Nüsse, and E. Voges, "Electrostatic parallel-plate actuators with large deflections for use in optical moving-fiber switches," J. Micromech. Microeng., vol. 11, pp. 323-328, 2001.