Microthermal machining using scanning thermal microscopy

Applied Surface Science

Volumn 240, Issue 1-4, 2005, Pages 312-317

  Fang, Te Hua ^a   Chang, Win Jin ^b  

^a SOUTHERN TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^b KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

High density data storage; Microthermal machining; Polymer; SThM

Indexed keywords

ATOMIC FORCE MICROSCOPY; DATA REDUCTION; ELECTRIC RESISTANCE; MICROELECTRONIC PROCESSING; POLYMERS; SCANNING; THERMAL EFFECTS; THERMOANALYSIS;

HIGH DENSITY DATA STORAGE; MICROTHERMAL MACHINING; SILICON NITRIDES; STHM;

MICROSCOPIC EXAMINATION;

EID: 10444242626     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2004.06.148     Document Type: Article

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