Research on Micro Machining using AFM Diamond Tip

Key Engineering Materials

Volumn 258-259, Issue , 2004, Pages 577-581

  Sun, T ^a   Yan, Y D ^a   Xia, J F ^a   Dong, S ^a   Liang, Y C ^a   Cheng, K ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

Atomic force microscope; Diamond tip; Micro machining

Indexed keywords

ABRASIVES; ATOMIC FORCE MICROSCOPY; COPPER; FABRICATION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROSTRUCTURE; OXIDATION; SINGLE CRYSTALS; SURFACE TREATMENT; LITHOGRAPHY; MEMS; VELOCITY MEASUREMENT;

DIAMOND TIPS; SCANNING PROBE MICROSCOPY (SPM); ATOMIC FORCE MICROSCOPES; DRESSING; MASK FABRICATION;

DIAMOND CUTTING TOOLS; DIAMONDS;

EID: 1642312896     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

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