AFM for preparing Si masters in soft lithography

Key Engineering Materials

Volumn 315-316, Issue , 2006, Pages 762-765

  Zhao, X L ^a   Dong, S ^a   Liang, Y C ^a   Sun, T ^a   Yan, Y D ^a  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

Author keywords

AFM; PDMS; Soft lithography

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTOMERS; IMAGING TECHNIQUES; LITHOGRAPHY; MORPHOLOGY; SILICONES; SUBSTRATES;

AFM; PDMS; POLYDIMETHYLSILOXANE (PDMS); SOFT LITHOGRAPHY;

SILICON;

EID: 33745620453     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/0-87849-999-7.762     Document Type: Conference Paper

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