Large-area growth of vertically aligned ZnO pillars by radio-frequency magnetron sputtering

Applied Physics A: Materials Science and Processing

Volumn 87, Issue 4, 2007, Pages 749-753

  Huang, J H ^a   Wang, C Y ^a   Liu, C P ^a   Chu, W H ^a   Chang, Y J ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; GROWTH (MATERIALS); HYDROGEN; MAGNETRON SPUTTERING; NUCLEATION; PLASMA SOURCES; STABILIZATION;

RADIO-FREQUENCY MAGNETRON SPUTTERING; REPRODUCIBILITY; SHADOWING EFFECTS; UNIFORMITY;

ZINC OXIDE;

EID: 34247346828     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-007-3893-0     Document Type: Article

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