Integrated signal conditioning for diaphragm pressure sensors

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 1979, Pages 196-197

  Borky, J ^a   Wise, K ^b  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; STRAIN MEASUREMENT;

DIAPHRAGM PRESSURE; EXTERNAL COMPONENTS; PIEZORESISTIVE PRESSURE SENSORS; PRESSURE RANGES; THIN DIAPHRAGMS;

PRESSURE SENSORS;

EID: 84957984570     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.1979.1155903     Document Type: Conference Paper

References (4)

1. Wise, K. D., Clark, S. K., "Diaphragm Formation and Pressure Sensitivity in Bath-Fabricated Silicon Pressure Sensors", IE DM Digest of Technical Papers, p. 96-99; Dec, 1978.
2. Samaun, Wise, K. D., Angell, J. B., "An IC Piezoresis-tive Pressure Sensor for Biomedical Instrumentation", IEEE Trans. Biomed. Eng., vol. BME-20, p. 101; March, 1973.
3. Borky, J. M., "Silicon Diaphragm Pressure Sensors with Integrated Electronics", Ph. D. Dissertation, The University of Michigan; 1977.
4. Grebene, A. B., "Analog Integrated Circuit Design", Van Nostrand-Reinhold; 1972.