Dielectric thin films for MEMS-based optical sensors

Microelectronics Reliability

Volumn 47, Issue 4-5 SPEC. ISS., 2007, Pages 733-738

  Martyniuk, M ^a   Antoszewski, J ^a   Musca, C A ^a   Dell, J M ^a   Faraone, L ^a  

^a UNIVERSITY OF WESTERN AUSTRALIA   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELASTIC MODULI; MEMS; MONOLITHIC INTEGRATED CIRCUITS; NANOINDENTATION; OPTICAL SENSORS; OPTICAL VARIABLES MEASUREMENT;

CRITICAL DEPOSITION TEMPERATURE; DIELECTRIC THIN FILMS; IR MICROSPECTROMETERS;

THIN FILMS;

EID: 34247142838     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2007.01.060     Document Type: Article

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