Investigation of evolution hydrocarbon species on a Si surface during methane plasma with and without substrate bias, using infrared spectroscopy in multiple internal reflection geometry

Applied Surface Science

Volumn 253, Issue 14, 2007, Pages 6242-6247

  Shinohara, Masanori ^a   Shibata, Hiromichi ^a   Cho, Ken ^a   Nakatani, Tatsuyuki ^a,b   Okamoto, Keishi ^b   Matsuda, Yoshinobu ^a   Fujiyama, Hiroshi ^a  

^a NAGASAKI UNIVERSITY   (Japan)

^b Toyo Advanced Technologies Co Ltd   (Japan)

Author keywords

Hydrocarbon; Hydrogen; Infrared spectroscopy; Plasma processing

Indexed keywords

HEATING; HYDROGEN; INFRARED SPECTROSCOPY; PLASMA APPLICATIONS; REFLECTION; SILICON;

INTERNAL REFLECTION GEOMETRY; ION EFFECTS; METHANE PLASMA; RELATIVE DENSITY; SUBSTRATE BIAS;

HYDROCARBONS;

EID: 34247095150     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.01.067     Document Type: Article

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