Coating of DLC film by pulsed discharge plasma CVD

Diamond and Related Materials

Volumn 14, Issue 11-12, 2005, Pages 1791-1794

  Noda, M ^a,b,c   Umeno, M ^b  

^a MIE UNIVERSITY   (Japan)

^b CHUBU UNIVERSITY   (Japan)

^c NONE   (Japan)

Author keywords

Coating; Diamond like carbon; Plasma CVD; Ti and steel substrate

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRON DIFFRACTION; STAINLESS STEEL; SUBSTRATES;

PULSED DISCHARGE PLASMA; TRANSMISSION ELECTRON DIFFRACTION (TED);

DIAMOND LIKE CARBON FILMS;

EID: 27744449834     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.09.009     Document Type: Conference Paper

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