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Volumn 52, Issue 16, 2007, Pages 5258-5265
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Stress behavior of electrodeposited copper films as mechanical supporters for light emitting diodes
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Author keywords
Copper electrodeposition; Intrinsic stress; Light emitting diodes; Nucleation and growth
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Indexed keywords
COPPER;
ELECTRODEPOSITION;
FILM GROWTH;
GALLIUM NITRIDE;
LIGHT EMITTING DIODES;
NUCLEATION;
STRESS ANALYSIS;
COPPER ELECTRODEPOSITION;
COPPER FILMS;
COPPER SUPPORTERS;
INTRINSIC STRESS;
THICK FILMS;
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EID: 34047155568
PISSN: 00134686
EISSN: None
Source Type: Journal
DOI: 10.1016/j.electacta.2007.02.040 Document Type: Article |
Times cited : (31)
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References (24)
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