메뉴 건너뛰기




Volumn 85, Issue 2, 2007, Pages 103-106

Effect of triethanolamine on deposition rate of electroless copper plating

Author keywords

AFM; Deposition rate; Electroless deposition; Superfilling; TEA; XRD

Indexed keywords

ATOMIC FORCE MICROSCOPY; COPPER; DEPOSITION RATES; ELECTROLESS PLATING; REDUCTION; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

EID: 33947627190     PISSN: 00202967     EISSN: None     Source Type: Journal    
DOI: 10.1179/174591907X177543     Document Type: Article
Times cited : (25)

References (19)
  • 15
    • 33947614893 scopus 로고    scopus 로고
    • S. Shingubara, Z. Wang, O. Yaegashi, R. Obata, H. Sakaue and T. Talahagi: 'Technical digest of international electron devices meeting', 6.3.1-6.3.4; 2003, Washington, DC, IEEE.
    • S. Shingubara, Z. Wang, O. Yaegashi, R. Obata, H. Sakaue and T. Talahagi: 'Technical digest of international electron devices meeting', 6.3.1-6.3.4; 2003, Washington, DC, IEEE.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.