Characterization of magnetic Ni/n-Si Schottky contact for hydrogen gas sensing applications

Sensors and Actuators, B: Chemical

Volumn 122, Issue 2, 2007, Pages 572-577

  Salehi, Alireza ^a   Nazerian, Vahdat ^a  

^a K N TOOSI UNIVERSITY OF TECHNOLOGY   (Iran)

Author keywords

Gas sensitivity; Magnetic Ni n Si sensor; Magnetic profile; Schottky contact

Indexed keywords

CHARACTERIZATION; CURRENT VOLTAGE CHARACTERISTICS; GAS SENSING ELECTRODES; MAGNETIC FIELDS; MAGNETIC FILMS; SUBSTRATES;

GAS SENSITIVITY; HYDROGEN GAS SENSING; MAGNETIC PROFILES; SCHOTTKY CONTACTS;

MAGNETIC SENSORS;

EID: 33947200312     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2006.07.001     Document Type: Article

References (24)

1. Dobos K., Armgarth M., Zimmer G., and Lundstroem I. The influence of different insulators on d-gate material-insulator-semiconductor hydrogen sensor. IEEE Trans. Elec. Dev. ED-31 (1984) 508-510
2. Ogita M., Ye D., Kawamura K., and Yamamoto T. An integrated hydrogen-switching sensor with a Pd-Si tunnel MIS structure. Sens. Actuators 9 (1986) 157-164
3. Kang B.S., Kim S., Ren F., Gila B.P., Abernathy C.R., and Pearton S.J. Comparision of MOS and Schottky W/Pt-GaN diodes for hydrogen detection. Sens. Actuators B 104 (2005) 232-236
4. 3 based MRISiC hydrogen gas sensors. Sens. Actuators B 103 (2004) 129-135
5. 0.7As MOS hydrogen sensor. IEEE Elec. Dev. Lett. 24 (2002) 390-392
6. Seo H., Endoh T., Fukuda H., and Nomura S. Highly sensitive MOSFET gas sensor with porous platinum gate electrode. Electron. Lett. 33 (1997) 535-536
7. Lin K.W., Chen H.I., Chuang H.M., Chen C.Y., Lu C.T., Cheng C.C., and Liu W.C. Characteristics of Pd/InGaP Schottky diode hydrogen sensors. IEEE Sens. J. 4 (2004) 72-79
8. Talazac L., Barbarin F., Mazet L., and Varenne C. Improvement in sensitivity and selectivity of InP-based gas sensors: pseudo-Schottky diodes with palladium metallization. IEEE Sens. J. 4 (2004) 45-51
9. Tan O.K., Zhu W., Tse M.S., and Yao X. Hydrogen-sensitive I-V characteristics of metal-ferroelectric gas sensor device fabricated by sol-gel technique. Mater. Sci. Eng. B 58 (1999) 221-228
10. Salehi A., Nikfarjam A., and Kalantari D.J. Pd/porous-GaAs Schottky contact for hydrogen sensing application. Sens. Actuators B 113 (2006) 419-427
11. Bomk O.I., Il'chenko L.G., Il'chenko V.V., Pinchuk A.M., Pinchuk V.M., Kuznetsov G.V., and Strykha V.I. About the gas sensitivity of metal-silicon contacts with the superthin nickel and titanium films to the ammonia environment. Sens. Actuators B 62 (2000) 131-135
12. x gas sensor based on a Au/n-Si Schottky diode. Sens. Actuators B 84 (2002) 226-230
13. Sisodia V., Kabiraj D., and Jain I.P. Schottky barrier height measurement of swift heavy ion intermixed Ni-Silicide interface. Nucl. Instrum. Methods Phys. Res., Sect. B: Beam Interact. Mater. Atoms 225 (2004) 256-260
14. Qu X.-P., Jiang Y.-L., Ru G.-P., Lu F., Li B.-Z., Detavernier C., and Van Meirhaeghe R.L. Thermal stability, phase and interface uniformity of Ni-silicide formed by Ni-Si solid-state reaction. Thin Solid Films 462-463 (2004) 146-150
15. Hirose K., Hanta A., and Uda M. Initial stage of room temperature reaction at Ni/Si(1 1 1)-H interfaces. Appl. Surf. Sci. 162-163 (2000) 25-29
16. Moina C.A., and Vazader M. Electrodeposition of nano-sized nuclei of magnetic CO-Ni alloys onto n-Si(1 0 0). Electrochem. Commun. 3 (2001) 159-163
17. Sparks P.D., Stern N.P., Snowden D.S., Kappus B.A., Checkelsky J.G., Harberger S.S., Fusello A.M., and Eckert J.C. Stripe domainsd and magnetoresistance in thermally deposited nickel films. J. Magn. Mater. 272-276 (2004) e1339-e1340
18. Rivero C., Gergaud P., Thomas O., Froment B., and Jaouen H. In situ study of stress evolution during the reaction of a nickel film with a silicon substrate. Microelectron. Eng. 76 (2004) 318-323
19. Beltran A.M.L., and Galvan A.M. The oxidation kinetics of nickel thin films studied by spectroscopic ellipsometry. Thin Solid Films 503 (2006) 40-44
20. Shalguina E.E., Mukasheva M.A., Abrosimova N.M., Kozlovskii L., Tamanis E., and Shalygin A.N. The influence of annealing on magnetic and magneto-optical properties of iron and nickel films. J. Magn. Mater. 300 (2006) e367-e370
21. Salehi A., and Nikfarjam A. Room temperature carbon monoxide sensor using ITO/nGaAs Schottky contact. Sens. Actuators B 101 (2004) 394-400
22. Nakagomi S., Spetz A.L., Lundstrom I., and Tobies P. Electrical characterization of CO sensitive high temperature sensor diode based on catalytic metal gate-insulator-silicon carbide structure. IEEE Sens. J. 2 (2002) 379-386
23. Bozec D., Howson M.A., Hickey B.J., Shatz S., Wiser N., Tsymbal E.Y., and Pettifor D.G. Mean free path effects on the current perpendicular to the plane magneto resistance of magnetic multi layers. Phys. Rev. Lett. 85 (2000)
24. Bass J., Schroeder P.A., Pratt Jr. W.P., Lee S.F., Yang Q., Holody P., Henry L.L., and Loloee R. Studying spin-dependent scattering in magnetic multi layers by means of perpendicular (CPP) magneto resistance measurements. Mater. Sci. Eng. B 31 (1995) 77-83