About the gas sensitivity of metal-silicon contacts with the superthin nickel and titanium films to the ammonia environment

Sensors and Actuators, B: Chemical

Volumn 62, Issue 2, 2000, Pages 131-135

  Bomk, O I ^a   Il'Chenko, L G ^b   Il'Chenko, V V ^a   Pinchuk, A M ^a   Pinchuk, V M ^a   Kuznetsov, G V ^a   Strykha, V I ^a  

^a TARAS SHEVCHENKO NATIONAL UNIVERSITY OF KYIV   (Ukraine)

^b INSTITUTE OF SURFACE CHEMISTRY   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; AMMONIA; METALLIC FILMS; NICKEL; PERMITTIVITY; SCHOTTKY BARRIER DIODES; SEMICONDUCTOR DEVICE STRUCTURES; THIN FILM DEVICES; TITANIUM;

METAL SILICON CONTACTS; QUANTUM CHEMISTRY;

CHEMICAL SENSORS;

EID: 0033879012     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00384-6     Document Type: Article

References (12)

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