Carbon aligned nanocolumns by RF-Magnetron sputtering: The influence of the growth parameters

Physica E: Low-Dimensional Systems and Nanostructures

Volumn 37, Issue 1-2, 2007, Pages 231-235

  Scalese, S ^a   Scuderi, V ^a   Simone, F ^b   Pennisi, A ^a   Compagnini, G ^b   Bongiorno, C ^a   Privitera, V ^a  

^a CNR   (Italy)

^b UNIVERSITY OF CATANIA   (Italy)

Author keywords

Carbon; Nanostructures; Nitrogen; RF magnetron sputtering

Indexed keywords

CONCENTRATION (PROCESS); DEPOSITION; MAGNETRON SPUTTERING; NITROGEN; SEMICONDUCTOR GROWTH;

CARBON ALIGNED NANOCOLUMNS; COLUMNAR SHAPE; NITROGEN-TO-CARBON; RADIOFREQUENCY (RF)-MAGNETRON SPUTTERING;

CARBON NANOTUBES;

EID: 33947184774     PISSN: 13869477     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physe.2006.06.009     Document Type: Article

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