-
1
-
-
0032674784
-
Recent advances in silicon etching for MEMS using the ASE process
-
Hynes A.M., Ashraf H., Bhardwaj J.K., Hopkins J., Johnson I., and Shepherd J.N. Recent advances in silicon etching for MEMS using the ASE process. Sensor Actuat A-Phys 74 (1999) 13
-
(1999)
Sensor Actuat A-Phys
, vol.74
, pp. 13
-
-
Hynes, A.M.1
Ashraf, H.2
Bhardwaj, J.K.3
Hopkins, J.4
Johnson, I.5
Shepherd, J.N.6
-
3
-
-
4444289857
-
Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina
-
Masuda H., and Fukuda K. Ordered metal nanohole arrays made by a two-step replication of honeycomb structures of anodic alumina. Science 268 (1995) 1466
-
(1995)
Science
, vol.268
, pp. 1466
-
-
Masuda, H.1
Fukuda, K.2
-
4
-
-
0000070894
-
Polycrystalline nanopore arrays with hexagonal ordering on aluminum
-
Li A.P., Müller F., Birner A., Nielsch K., and Gösele U. Polycrystalline nanopore arrays with hexagonal ordering on aluminum. J Vac Sci Technol A 17 (1999) 1428
-
(1999)
J Vac Sci Technol A
, vol.17
, pp. 1428
-
-
Li, A.P.1
Müller, F.2
Birner, A.3
Nielsch, K.4
Gösele, U.5
-
5
-
-
0347372922
-
Self-ordering regimes of porous alumina: the 10% porosity rule
-
Nielsch K., Choi J., Schwirn K., Wehrspohn R.B., and Gösele U. Self-ordering regimes of porous alumina: the 10% porosity rule. Nano Lett 2 (2002) 677
-
(2002)
Nano Lett
, vol.2
, pp. 677
-
-
Nielsch, K.1
Choi, J.2
Schwirn, K.3
Wehrspohn, R.B.4
Gösele, U.5
-
6
-
-
23844456326
-
Fabrication of microstructures by wet etching of anodic aluminum oxide substrates
-
Jee S.E., Lee P.S., Yoon B.J., Jeong S.W., and Lee K.H. Fabrication of microstructures by wet etching of anodic aluminum oxide substrates. Chem Mater 17 (2005) 4049
-
(2005)
Chem Mater
, vol.17
, pp. 4049
-
-
Jee, S.E.1
Lee, P.S.2
Yoon, B.J.3
Jeong, S.W.4
Lee, K.H.5
-
7
-
-
0039922980
-
Hexagonally ordered 100 nm period nickel nanowire arrays
-
Nielsch K., Wehrspohn R.B., Barthel J., Kirschner J., Gösele U., Fischer S.F., et al. Hexagonally ordered 100 nm period nickel nanowire arrays. Appl Phys Lett 79 (2001) 1360
-
(2001)
Appl Phys Lett
, vol.79
, pp. 1360
-
-
Nielsch, K.1
Wehrspohn, R.B.2
Barthel, J.3
Kirschner, J.4
Gösele, U.5
Fischer, S.F.6
-
8
-
-
0034076895
-
Oxidation kinetics of nickel particles: comparison between free particles and particles in an oxide matrix
-
Karmhag R., Tesfamichael T., Wackelgard E., Niklasson G.A., and Nygren M. Oxidation kinetics of nickel particles: comparison between free particles and particles in an oxide matrix. Solar Energy 68 (2000) 329
-
(2000)
Solar Energy
, vol.68
, pp. 329
-
-
Karmhag, R.1
Tesfamichael, T.2
Wackelgard, E.3
Niklasson, G.A.4
Nygren, M.5
-
9
-
-
0032575069
-
Carbon nanotubule membranes for electrochemical energy storage and production
-
Che G., Lakshmi B.B., Fihsher E.R., and Martin C.R. Carbon nanotubule membranes for electrochemical energy storage and production. Nature 393 (1998) 346
-
(1998)
Nature
, vol.393
, pp. 346
-
-
Che, G.1
Lakshmi, B.B.2
Fihsher, E.R.3
Martin, C.R.4
-
10
-
-
0003110210
-
Chemical vapor deposition based synthesis of carbon nanotubes and nanofibers using a template method
-
Che G., Lakshmi B.B., Martin C.R., Fihsher E.R., and Ruoff R.S. Chemical vapor deposition based synthesis of carbon nanotubes and nanofibers using a template method. Chem Mater 10 (1998) 260
-
(1998)
Chem Mater
, vol.10
, pp. 260
-
-
Che, G.1
Lakshmi, B.B.2
Martin, C.R.3
Fihsher, E.R.4
Ruoff, R.S.5
-
11
-
-
0000500801
-
Processing and characterization of single-crystalline ultrafine bismuth nanowires
-
Zhang Z.B., Gekhtman D., Dresselhaus M.S., and Ying J.Y. Processing and characterization of single-crystalline ultrafine bismuth nanowires. Chem Mater 11 (1999) 1659
-
(1999)
Chem Mater
, vol.11
, pp. 1659
-
-
Zhang, Z.B.1
Gekhtman, D.2
Dresselhaus, M.S.3
Ying, J.Y.4
-
12
-
-
33845427627
-
Highly ordered monocrystalline silver nanowire arrays
-
Sauer G., Brehm G., Schneider S., Nielsch K., Wehrspohn R.B., Choi J., et al. Highly ordered monocrystalline silver nanowire arrays. J Appl Phys 91 (2002) 3243
-
(2002)
J Appl Phys
, vol.91
, pp. 3243
-
-
Sauer, G.1
Brehm, G.2
Schneider, S.3
Nielsch, K.4
Wehrspohn, R.B.5
Choi, J.6
-
13
-
-
0031236953
-
A new technique for measuring the mechanical properties of thin films
-
Sharpe Jr. W.N., Yuan B., and Edwards R.L. A new technique for measuring the mechanical properties of thin films. IEEE J MEMS 6 (1997) 193
-
(1997)
IEEE J MEMS
, vol.6
, pp. 193
-
-
Sharpe Jr., W.N.1
Yuan, B.2
Edwards, R.L.3
-
14
-
-
0032026436
-
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin film
-
Tsuchiya T., Tabata O., Sakata J., and Taga Y. Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin film. IEEE J MEMS 7 (1998) 106
-
(1998)
IEEE J MEMS
, vol.7
, pp. 106
-
-
Tsuchiya, T.1
Tabata, O.2
Sakata, J.3
Taga, Y.4
-
15
-
-
2442502110
-
Young's modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach
-
Virwani K.R., Malshe A.P., Schmidt W.F., and Sood D.K. Young's modulus measurements of silicon nanostructures using a scanning probe system: a non-destructive evaluation approach. Smart Mater Struct 12 (2003) 1028
-
(2003)
Smart Mater Struct
, vol.12
, pp. 1028
-
-
Virwani, K.R.1
Malshe, A.P.2
Schmidt, W.F.3
Sood, D.K.4
-
16
-
-
0036529974
-
Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures
-
Namazu T., and Isono Y. Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures. J Microelectromech S 11 (2002) 125
-
(2002)
J Microelectromech S
, vol.11
, pp. 125
-
-
Namazu, T.1
Isono, Y.2
-
17
-
-
0036329379
-
Mechanical property measurements of nanoscale structures using an atomic force microscope
-
Sundararajan S., Bhushan B., Namazu T., and Isono Y. Mechanical property measurements of nanoscale structures using an atomic force microscope. Ultramicroscopy 91 (2002) 111
-
(2002)
Ultramicroscopy
, vol.91
, pp. 111
-
-
Sundararajan, S.1
Bhushan, B.2
Namazu, T.3
Isono, Y.4
-
18
-
-
0034468211
-
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
-
Namazu T., Isono Y., and Tanaka T. Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM. J Microelectromech S 9 (2000) 450
-
(2000)
J Microelectromech S
, vol.9
, pp. 450
-
-
Namazu, T.1
Isono, Y.2
Tanaka, T.3
-
19
-
-
0037202396
-
Development of AFM-based techniques to measure mechanical properties of nanoscale structures
-
Sundararajan S., and Bhushan B. Development of AFM-based techniques to measure mechanical properties of nanoscale structures. Sensor Actuat A Phys 101 (2002) 338
-
(2002)
Sensor Actuat A Phys
, vol.101
, pp. 338
-
-
Sundararajan, S.1
Bhushan, B.2
-
20
-
-
0037445407
-
2 wire at intermediate temperatures using AFM-based technique
-
2 wire at intermediate temperatures using AFM-based technique. Sensor Actuat A Phys 104 (2003) 78
-
(2003)
Sensor Actuat A Phys
, vol.104
, pp. 78
-
-
Namazu, T.1
Isono, Y.2
-
21
-
-
33847620598
-
-
Young WC, Budynas RG. Roark's formulas for stress and strain. 7th ed. 2002 [chapter 8].
-
-
-
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