Fabrication of microstructures by wet etching of anodic aluminum oxide substrates

Chemistry of Materials

Volumn 17, Issue 16, 2005, Pages 4049-4052

  Jee, Sang Eun ^a   Lee, Pyung Soo ^a   Yoon, Beom Jin ^a   Jeong, Soo Hwan ^b   Lee, Kun Hong ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM COMPOUNDS; ASPECT RATIO; ETCHING; MICROELECTROMECHANICAL DEVICES; MORPHOLOGY; PHOTOPOLYMERIZATION; SCANNING ELECTRON MICROSCOPY; SUBSTRATES;

ALUMINUM OXIDE SUBSTRATES; ANODIC ALUMINUM OXIDE (AAO); STATE-OF-THE-ART FABRICATION; WET ETCHING;

MICROSTRUCTURE;

EID: 23844456326     PISSN: 08974756     EISSN: None     Source Type: Journal    
DOI: 10.1021/cm0486565     Document Type: Article

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