-
1
-
-
0033297078
-
Measurement of mechanical properties for MEMS materials
-
T. Yi, C.J. Kim, Measurement of mechanical properties for MEMS materials, Meas. Sci. Technol. 10 (1999) 706.
-
(1999)
Meas. Sci. Technol.
, vol.10
, pp. 706
-
-
Yi, T.1
Kim, C.J.2
-
2
-
-
0032026436
-
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin film
-
T. Tsuchiya, O. Tabata, J. Sakata, Y. Taga, Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin film, J. Microelectromech. Syst. 7 (1) (1998) 106.
-
(1998)
J. Microelectromech. Syst.
, vol.7
, Issue.1
, pp. 106
-
-
Tsuchiya, T.1
Tabata, O.2
Sakata, J.3
Taga, Y.4
-
3
-
-
0031236953
-
A new technique for measuring the mechanical properties of thin films
-
W.N. Sharpe Jr., B. Yuan, R.L. Awards, A new technique for measuring the mechanical properties of thin films, J. McRoelectromech. Syst 6 (3) (1997) 193.
-
(1997)
J. McRoelectromech. Syst
, vol.6
, Issue.3
, pp. 193
-
-
Sharpe W.N., Jr.1
Yuan, B.2
Awards, R.L.3
-
4
-
-
36549104881
-
Fracture testing of silicon microelements in situ in a scanning electron microscope
-
S. Johansson, J.-Å. Schweitz, L. Tenerz, J. Tiren, Fracture testing of silicon microelements in situ in a scanning electron microscope, J. Appl. Phys. 63 (10) (1988) 4799.
-
(1988)
J. Appl. Phys.
, vol.63
, Issue.10
, pp. 4799
-
-
Johansson, S.1
Schweitz, J.-Å.2
Tenerz, L.3
Tiren, J.4
-
5
-
-
0034468211
-
Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM
-
T. Namazu, Y. Isono, T. Tanaka, Evaluation of size effect on mechanical properties of single crystal silicon by nanoscale bending test using AFM, J. Microelectromech. Syst. 9 (4) (2000) 450.
-
(2000)
J. Microelectromech. Syst.
, vol.9
, Issue.4
, pp. 450
-
-
Namazu, T.1
Isono, Y.2
Tanaka, T.3
-
6
-
-
0036529974
-
Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures
-
T. Namazu, Y. Isono, T. Tanaka, Plastic deformation of nanometric single crystal silicon wire in AFM bending test at intermediate temperatures, J. Microelectromech. Syst. 11 (2) (2002) 125.
-
(2002)
J. Microelectromech. Syst.
, vol.11
, Issue.2
, pp. 125
-
-
Namazu, T.1
Isono, Y.2
Tanaka, T.3
-
8
-
-
0018541427
-
Young's modulus measurements of thin films using micromechanics
-
K.E. Petersen, C.R. Guarnieri, Young's modulus measurements of thin films using micromechanics, J. Appl. Phys. 50 (1979) 6761.
-
(1979)
J. Appl. Phys.
, vol.50
, pp. 6761
-
-
Petersen, K.E.1
Guarnieri, C.R.2
-
9
-
-
0013403665
-
4 films carried out on a silicon chip
-
Sendai, Japan
-
4 films carried out on a silicon chip, in: Proceedings of Transducers'99, Sendai, Japan, 1999, p. 469.
-
(1999)
Proceedings of Transducers'99
, pp. 469
-
-
Yoshioka, T.1
Ando, T.2
Shikida, M.3
Sato, K.4
-
13
-
-
0001413452
-
Miniature cantilever beams fabricated by anisotropic etching of silicon
-
R.D. Jolly, R.S. Muller, Miniature cantilever beams fabricated by anisotropic etching of silicon, J. Electrochem. Soc. 127 (12) (1980) 2750.
-
(1980)
J. Electrochem. Soc.
, vol.127
, Issue.12
, pp. 2750
-
-
Jolly, R.D.1
Muller, R.S.2
-
15
-
-
0032023865
-
Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high density AFM thermomechanical data strage
-
B.W. Chui, T.D. Stowe, Y.S. Ju, K.E. Goodson, T.W. Kenny, H.J. Mamin, B.D. Terris, R.P. Ried, D. Rugar, Low-stiffness silicon cantilevers with integrated heaters and piezoresistive sensors for high density AFM thermomechanical data strage, J. Microelectromech. Syst. 7 (1) (1998) 69.
-
(1998)
J. Microelectromech. Syst.
, vol.7
, Issue.1
, pp. 69
-
-
Chui, B.W.1
Stowe, T.D.2
Ju, Y.S.3
Goodson, K.E.4
Kenny, T.W.5
Mamin, H.J.6
Terris, B.D.7
Ried, R.P.8
Rugar, D.9
-
18
-
-
0001153676
-
The statistical approach to engineering design in ceramics
-
D.G.S. Davis, The statistical approach to engineering design in ceramics, Proc. Br. Ceram. Soc. 22 (1973) 429.
-
(1973)
Proc. Br. Ceram. Soc.
, vol.22
, pp. 429
-
-
Davis, D.G.S.1
-
19
-
-
0000357002
-
The phenomena of rupture and flow in solids
-
A.A. Griffith, The phenomena of rupture and flow in solids, Philos. Trans. R. Sot. Lond. A221 (1920) 163.
-
(1920)
Philos. Trans. R. Sot. Lond.
, vol.A221
, pp. 163
-
-
Griffith, A.A.1
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