Nanomechanical properties of sub-10 nm carbon film overcoats using the nanoindentation technique

Journal of Materials Research

Volumn 22, Issue 1, 2007, Pages 141-151

  Yeo, Chang Dong ^a   Polycarpou, Andreas A ^a   Kiely, James D ^b   Hsia, Yiao Tee ^b  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^b SEAGATE RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; FILM THICKNESS; HARDNESS; MECHANICAL PROPERTIES; NANOINDENTATION; SURFACE ROUGHNESS;

CARBON FILM OVERCOATS; NANOINDENTATION SYSTEM; NANOINDENTATION TECHNIQUE; NANOMECHANICAL PROPERTIES;

CARBON FILMS;

EID: 33847607367     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0007     Document Type: Article

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