Shunting arc-produced hybrid plasma and its magnetic drive for PBII&D

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6490-6494

  Takaki, K ^a   Mukaigawa, S ^a   Fujiwara, T ^a   Yukimura, K ^b  

^a IWATE UNIVERSITY   (Japan)

^b DOSHISHA UNIVERSITY   (Japan)

Author keywords

Hybrid plasma; Magnetic drive; Methane; Plasma based ion implantation; Shunting arc

Indexed keywords

CARBON; CARBON FILMS; ELECTRIC CURRENT MEASUREMENT; ION IMPLANTATION; LORENTZ FORCE; METHANE; NITROGEN; PLASMA DENSITY; PRESSURE;

HYBRID PLASMA; MAGNETIC DRIVE; PLASMA-BASED ION IMPLANTATION; SHUNTING ARC;

PLASMA APPLICATIONS;

CARBON; CARBON FILMS; ELECTRIC CURRENT MEASUREMENT; ION IMPLANTATION; LORENTZ FORCE; METHANE; NITROGEN; PLASMA APPLICATIONS; PLASMA DENSITY; PRESSURE;

EID: 33847360584     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.092     Document Type: Article

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