Ion extraction from carbon shunting arc plasma

Applied Physics Letters

Volumn 82, Issue 16, 2003, Pages 2583-2585

  Takaki, K ^a   Mukaigawa, S ^a   Fujiwara, T ^a   Kumagai, M ^b   Yukimura, K ^b  

^a IWATE UNIVERSITY   (Japan)

^b DOSHISHA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITION; ELECTRIC POTENTIAL; PLASMA DENSITY;

ION EXTRACTION;

ION IMPLANTATION;

EID: 0038300025     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1568822     Document Type: Article

References (10)

1. R. J. Adler and S. T. Picraux, Nucl. Instrum. Methods Phys. Res. B 6, 123 (1985).
2. J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala, and N. C. Tran, J. Appl. Phys. 62, 4591 (1987).
3. W. Ensinger, K. Volz, and B. Enders, Surf. Coat. Technol. 136, 202 (2001).
4. M. Yoshida, T. Tanaka, M. Shinihara, S. Watanabe, J. W. Lee, and T. Takagi, J. Vac. Sci. Technol. A 20, 1 (2002).
5. K. Yukimura and S. Masamune, Surf. Coat. Technol. 156, 31 (2002).
6. K. Yukimura and S. Masamune, Rev. Sci. Instrum. 73, 860 (2002).
7. K. Yukimura, R. Isano, T. Monguchi, and K. Yoshioka, J. Vac. Sci. Technol. B 17, 871 (1999).
8. K. Yukimura and Y. Tani, Surf. Coat. Technol. 142-144, 388 (2001).
9. J. Brutscher, R. Günzel, and W. Möller, Plasma Sources Sci. Technol. 5, 54 (1995).
10. K. Takaki, S. Mukaigawa, T. Fujiwara, M. Kumagai, and K. Yukimura, Nucl. Instrum. Methods Phys. Res. B (to be published).