Carbon shunting arc in RF nitrogen plasmas - A basic study on plasma-based ion implantation

Vacuum

Volumn 65, Issue 3-4, 2002, Pages 341-346

  Yukimura, Ken ^a   Tenno, Nobuyuki ^a   Masamune, Sadao ^b  

^a DOSHISHA UNIVERSITY   (Japan)

^b KYOTO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Arc discharge; Ion sheath; Plasma based ion implantation; RF plasma; Shunting arc plasma

Indexed keywords

ELECTRIC ARCS; IGNITION; ION IMPLANTATION; NITROGEN;

PLASMA-BASED ION IMPLANTATION;

PLASMA SOURCES;

EID: 0037182076     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(01)00440-7     Document Type: Conference Paper

References (2)