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Volumn 7 MEMS, Issue , 2005, Pages 737-740

Planar microfabricated check valves utilizing large compliance of PDMS

Author keywords

[No Author keywords available]

Indexed keywords

DIODICITY; MICROFABRICATED CHECK VALVES; REPLICA MOLDING TECHNIQUE;

EID: 33645996046     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2005-81958     Document Type: Conference Paper
Times cited : (1)

References (10)
  • 3
    • 0027695246 scopus 로고
    • A valveless diffitser/nozzle-based fluid pump
    • E. Stemme and G. Stemme, "A Valveless Diffitser/Nozzle-based Fluid Pump," Sensors and Actuators: A, 39 (1993), pp. 159-167.
    • (1993) Sensors and Actuators: A , vol.39 , pp. 159-167
    • Stemme, E.1    Stemme, G.2
  • 4
    • 0036544018 scopus 로고    scopus 로고
    • Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers
    • V. Seidemann, S. Butefisch, and S. Buttgenbach, "Fabrication and Investigation of In-plane Compliant SU8 Structures for MEMS and Their Application to Micro Valves and Micro Grippers," Sensors and Actuators: A, 97-8 (2002), pp. 457-461.
    • (2002) Sensors and Actuators: A , vol.97 , Issue.8 , pp. 457-461
    • Seidemann, V.1    Butefisch, S.2    Buttgenbach, S.3
  • 5
    • 0036789372 scopus 로고    scopus 로고
    • High-pressure microfluidic control in lab-on-a-chip devices using mobile polymer monoliths
    • E.F. Hasselbrink Jr., T.J. Shepodd, and J.E. Rehm, "High-Pressure Microfluidic Control in Lab-on-a-Chip Devices Using Mobile Polymer Monoliths," Analytical Chemistry, 74 (2002), pp. 4913-4918.
    • (2002) Analytical Chemistry , vol.74 , pp. 4913-4918
    • Hasselbrink Jr., E.F.1    Shepodd, T.J.2    Rehm, J.E.3
  • 6
    • 3042833517 scopus 로고    scopus 로고
    • In-situ fabricated micro check-valve utilizing the spring force of a hydrogel
    • Squaw Valley, CA, Oct. 5-9
    • D. Kim and D.J. Beebe, In-situ Fabricated Micro Check-Valve Utilizing the Spring Force of a Hydrogel," MicroTAS '03, Squaw Valley, CA, Oct. 5-9, 2003, pp. 527-530.
    • (2003) MicroTAS '03 , pp. 527-530
    • Kim, D.1    Beebe, D.J.2
  • 9
    • 0032626712 scopus 로고    scopus 로고
    • Re-configurable fluid circuits by PDMS elastomer micromachining
    • Orland, FL, Jan. 17-21
    • D. Armani, C. Liu, and N. Aluru, "Re-configurable Fluid Circuits By PDMS Elastomer Micromachining," MEMS '99, Orland, FL, Jan. 17-21, 1999, pp. 222-227.
    • (1999) MEMS '99 , pp. 222-227
    • Armani, D.1    Liu, C.2    Aluru, N.3
  • 10
    • 1642634570 scopus 로고    scopus 로고
    • Polydimethylsiloxane-based pattern transfer process for the post-IC integration of MEMS onto CMOS chips
    • D.S.W. Park, K. Kim, B. Pillans, and J.B. Lee, " Polydimethylsiloxane-based Pattern Transfer Process for the Post-IC Integration of MEMS onto CMOS Chips," Journal of Micromechanics and Microengineering, 14 (2004), pp. 335-340.
    • (2004) Journal of Micromechanics and Microengineering , vol.14 , pp. 335-340
    • Park, D.S.W.1    Kim, K.2    Pillans, B.3    Lee, J.B.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.