Low-Leakage micro gate valves

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 143-146

  Frank, J A ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Actuators; Etching; Fabrication; Fluid flow control; Fluidics; Mechanical engineering; Microvalves; Orifices; Silicon; Valves

Indexed keywords

ACTUATORS; ETCHING; FABRICATION; FLOW OF FLUIDS; FLUIDICS; MECHANICAL ACTUATORS; MECHANICAL ENGINEERING; MICROSYSTEMS; ORIFICES; SILICON; SILICON WAFERS; TRANSDUCERS; VALVES (MECHANICAL);

CHANNEL WALL; DEVICE DESIGN; FABRICATION PROCESS; FLUIDIC RESISTANCES; LEAKAGE PATHS; MICRO VALVES; SELF ALIGNED PROCESS; VALVE SEATS;

SOLID-STATE SENSORS;

EID: 84944728946     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215273     Document Type: Conference Paper

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