Surface modification of silicate glasses by nanoimprint using nanostriped NiO thin film molds

Applied Surface Science

Volumn 253, Issue 10, 2007, Pages 4512-4514

  Akiba, Shusaku ^a   Hara, Wakana ^a   Watanabe, Takahiro ^a   Matsuda, Akifumi ^a   Kasahara, Masayasu ^a   Yoshimoto, Mamoru ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Imprint; Nanogroove; Oxide glass; Oxide glass nanopattern; Oxide thin film mold

Indexed keywords

ANNEALING; COOLING; NANOSTRUCTURED MATERIALS; NICKEL COMPOUNDS; SILICATE MINERALS; THIN FILMS;

NANOGROOVE; OXIDE GLASS; OXIDE GLASS NANOPATTERN; OXIDE THIN FILM MOLD;

GLASS;

EID: 33847017694     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.10.002     Document Type: Article

References (14)

1. Herzing H. Micro-optics (1997), Taylor and Francis, Philadelphia
2. Fischer V., Matsuura T., and Hirota S. Laser Focus World 31 (1995) 167
3. Hock M., Schäffer E., Döll W., and Kleer G. Surf. Coat. Technol. 163-164 (2003) 689
4. Chou S.Y., Krauss P.R., and Renstrom P.J. Appl. Phys. Lett. 67 (1995) 3114
5. Chou S.Y., Krauss P.R., and Renstrom P.J. Science 272 (1996) 85
6. Heidari B., Maximov I., Sarwe E.-L., and Montelius L. J. Vac. Sci. Technol. B 17 (1999) 2961
7. Morita T., Watanabe K., Kometani R., Kanda K., Haruyama Y., Kaito T., Fujita J., Ishida M., Ochiai Y., Tajima T., and Matsui S. Jpn. J. Appl. Phys. 42 (2003) 3874
8. Hirai Y., Hanakugi K., Yamaguchi T., Yao K., Kitagawa S., and Tanaka Y. Microelectron. Eng. 67-68 (2003) 237
9. Chou S.Y., Krauss P.R., Zhang W., Guo L., and Zhuang L. J. Vac. Sci. Technol. B 15 (1997) 2897
10. Pang S.W., Tamamura T., Nakao M., Ozawa A., and Masuda H. J. Vac. Sci. Technol. B 16 (1998) 1145
11. Taniguchi J., Tokano Y., Miyamoto I., Komuro M., and Hiroshima H. Nanotechnology 13 (2002) 592
12. Lee P.S., Lee O.J., Hwang S.K., Jung S.-H., Jee S.E., and Lee K.H. Chem. Mater. 17 (2005) 6181
13. Piao Y., Lim H., Chang J.Y., Lee W.Y., and Kim H. Electrochim. Acta 50 (2005) 2997
14. Yoshimoto M., Maeda T., Ohnishi T., Koinuma H., Ishiyama O., Shinohara M., Kubo M., Miura R., and Miyamoto A. Appl. Phys. Lett. 67 (1995) 2615